用微拉曼光谱、原子力显微镜和x射线衍射表征有机场效应晶体管结构

2008 International Conference on Advanced Semiconductor Devices and Microsystems Pub Date : 2008-10-01 DOI:10.1109/ASDAM.2008.4743331

R. Srnánek, J. Kovác, J. Jakabovic, G. Irmer, E. Dobročka, D. Haško

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引用次数: 1

摘要

三种独立的方法表明，在聚二甲苯C表面生长的并五苯膜比在SiO2表面生长的膜具有更好的分子微观结构。电学测量证实了这些结果，并且在OFET器件中获得了0.15 cm2 /Vs的载流子迁移率。

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Characterisation of organic field effect transistor structures by micro-Raman spectroscopy, AFM and XRD methods

Three independent methods show clear evidence that pentacene layers grown on parylene C layer had better molecular microstructure compared to films grown on SiO2 surface. The electrical measurements confirmed these results and carrier mobility of 0.15 cm2 /Vs was obtained in OFET devices.

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2008 International Conference on Advanced Semiconductor Devices and Microsystems

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