一个5伏操作的MEMS可变光衰减器

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI:10.1109/SENSOR.2003.1217128

H. Toshiyoshi, K. Isamoto, A. Morosawa, M. Tei, H. Fujita

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引用次数: 32

摘要

本文报道了一种采用静电微扭镜和光纤准直器相结合的微机械可变光衰减器。VOA工作在低电压(直流5v或以下)下，光衰减大(40db)，响应时间快(5ms或更快)。镜子的设计是抗冲击性高达100g而不会引起操作错误，高达500G而不会出现任何机械故障。我们还通过机械地将寄生双晶圆效应与静电操作解耦，抑制了VOA光学性能的温度依赖性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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A 5-volt operated MEMS variable optical attenuator

We report a micro mechanical variable optical attenuator (VOA) using an electrostatic micro torsion mirror combined with a fiber-optic collimator. The VOA operates at low voltages (DC 5 V or less) for large optical attenuation (40 dB) and fast response time (5 ms or faster). The mirror has been designed to be shock-resistive up to 100 G without causing operation error and up to 500G without any mechanical failure. We also have suppressed temperature dependence of VOA's optical performance by mechanically decoupling the parasitic bimorph effect from the electrostatic operation.

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来源期刊

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)

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