MEMS可靠性及金质微结构的机械疲劳试验

2008 International Conference on Perspective Technologies and Methods in MEMS Design Pub Date : 2008-05-21 DOI:10.1109/MEMSTECH.2008.4558749

G. De Pasquale, A. Somà

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引用次数: 6

摘要

分析了MEMS金结构的机械疲劳行为。为了确定在一定的驱动电压下材料中的张力水平，进行了初步的数值有限元模拟。为了监测加载过程中损伤的累积，进行了试验试验;通过对器件拉入电压的监测来评价材料的疲劳效应。

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Reliability in MEMS and mechanical fatigue tests on gold micro-structures

The mechanical fatigue behavior of MEMS gold structures is analyzed. Preliminary numerical FEM simulations are performed to determine the tension level in the material for a certain actuation voltage. Experimental tests are performed in order to monitor the damage accumulation during loading cycles; fatigue effect on material is evaluated through the monitoring of the pull-in voltage of the device.

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2008 International Conference on Perspective Technologies and Methods in MEMS Design

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