提高了高倍率热成像的性能

2009 16th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits Pub Date : 2009-07-06 DOI:10.1109/IPFA.2009.5232602

Hiroyoshi Suzuki, K. Koshikawa, Takahiko Kuroda, Toshimichi Ishizuka, Fan Pin Gyue, Fang Pei Yuan, Wang Jia Ji

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引用次数: 4

摘要

我们已经开发了一种30倍红外敏感的热显微镜镜头，使其能够在超过100倍的高放大倍率下观察热图像，并结合固体浸没镜头。我们可以发现，在小于1µm的线和空间内，可以观察到100倍以上的高倍率和高分辨率的热图像

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Improvement of performance for higher magnification thermal imaging

We have developed a 30x IR sensitive lens for thermal microscopy making it possible to observe thermal images under high magnification beyond 100x in combination with a solid immersion lens. And we could find that it possible to observe thermal images with high magnification beyond 100x and high resolution as less than 1 µm line and space

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2009 16th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits

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