{"title":"采用三维压电t形作动器的微型扫描力显微镜","authors":"J. Chu, R. Maeda, T. Itoh, K. Kataoka, T. Suga","doi":"10.1109/IMNC.1999.797514","DOIUrl":null,"url":null,"abstract":"Recently, scanning force microscopy (SFM) has gained much attention for its potential in surface lithography and data storage applications, particularly because of its capability for very small bit size. However, there are problems to be overcome before SFM can be used for real practical lithography and data storage, particularly its low throughput. In order to overcome these problems, we need small SFM volumes and simple SFM structures. In this report we propose a micro-fabricated SFM device. We expect it to replace the cantilever, deflection detection unit and the scanner currently being used in traditional SFMs.","PeriodicalId":120440,"journal":{"name":"Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International Microprocesses and Nanotechnology Conference","volume":"69 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1999-07-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"A micro-fabricated scanning force microscope using a 3-dimensional piezoelectric T-shape actuator\",\"authors\":\"J. Chu, R. Maeda, T. Itoh, K. Kataoka, T. Suga\",\"doi\":\"10.1109/IMNC.1999.797514\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Recently, scanning force microscopy (SFM) has gained much attention for its potential in surface lithography and data storage applications, particularly because of its capability for very small bit size. However, there are problems to be overcome before SFM can be used for real practical lithography and data storage, particularly its low throughput. In order to overcome these problems, we need small SFM volumes and simple SFM structures. In this report we propose a micro-fabricated SFM device. We expect it to replace the cantilever, deflection detection unit and the scanner currently being used in traditional SFMs.\",\"PeriodicalId\":120440,\"journal\":{\"name\":\"Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International Microprocesses and Nanotechnology Conference\",\"volume\":\"69 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1999-07-06\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International Microprocesses and Nanotechnology Conference\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IMNC.1999.797514\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International Microprocesses and Nanotechnology Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IMNC.1999.797514","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A micro-fabricated scanning force microscope using a 3-dimensional piezoelectric T-shape actuator
Recently, scanning force microscopy (SFM) has gained much attention for its potential in surface lithography and data storage applications, particularly because of its capability for very small bit size. However, there are problems to be overcome before SFM can be used for real practical lithography and data storage, particularly its low throughput. In order to overcome these problems, we need small SFM volumes and simple SFM structures. In this report we propose a micro-fabricated SFM device. We expect it to replace the cantilever, deflection detection unit and the scanner currently being used in traditional SFMs.