采用三维压电t形作动器的微型扫描力显微镜

J. Chu, R. Maeda, T. Itoh, K. Kataoka, T. Suga
{"title":"采用三维压电t形作动器的微型扫描力显微镜","authors":"J. Chu, R. Maeda, T. Itoh, K. Kataoka, T. Suga","doi":"10.1109/IMNC.1999.797514","DOIUrl":null,"url":null,"abstract":"Recently, scanning force microscopy (SFM) has gained much attention for its potential in surface lithography and data storage applications, particularly because of its capability for very small bit size. However, there are problems to be overcome before SFM can be used for real practical lithography and data storage, particularly its low throughput. In order to overcome these problems, we need small SFM volumes and simple SFM structures. In this report we propose a micro-fabricated SFM device. We expect it to replace the cantilever, deflection detection unit and the scanner currently being used in traditional SFMs.","PeriodicalId":120440,"journal":{"name":"Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International Microprocesses and Nanotechnology Conference","volume":"69 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1999-07-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"A micro-fabricated scanning force microscope using a 3-dimensional piezoelectric T-shape actuator\",\"authors\":\"J. Chu, R. Maeda, T. Itoh, K. Kataoka, T. Suga\",\"doi\":\"10.1109/IMNC.1999.797514\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Recently, scanning force microscopy (SFM) has gained much attention for its potential in surface lithography and data storage applications, particularly because of its capability for very small bit size. However, there are problems to be overcome before SFM can be used for real practical lithography and data storage, particularly its low throughput. In order to overcome these problems, we need small SFM volumes and simple SFM structures. In this report we propose a micro-fabricated SFM device. We expect it to replace the cantilever, deflection detection unit and the scanner currently being used in traditional SFMs.\",\"PeriodicalId\":120440,\"journal\":{\"name\":\"Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International Microprocesses and Nanotechnology Conference\",\"volume\":\"69 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1999-07-06\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International Microprocesses and Nanotechnology Conference\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IMNC.1999.797514\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International Microprocesses and Nanotechnology Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IMNC.1999.797514","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0

摘要

近年来,扫描力显微镜(SFM)因其在表面光刻和数据存储方面的潜力而受到广泛关注,特别是因为它具有非常小的钻头尺寸的能力。然而,在将SFM用于实际的光刻和数据存储之前,还有一些问题需要克服,特别是它的低吞吐量。为了克服这些问题,我们需要小的SFM体积和简单的SFM结构。在本报告中,我们提出了一种微型制造的SFM装置。我们希望它能取代目前在传统SFMs中使用的悬臂、挠度检测单元和扫描仪。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
A micro-fabricated scanning force microscope using a 3-dimensional piezoelectric T-shape actuator
Recently, scanning force microscopy (SFM) has gained much attention for its potential in surface lithography and data storage applications, particularly because of its capability for very small bit size. However, there are problems to be overcome before SFM can be used for real practical lithography and data storage, particularly its low throughput. In order to overcome these problems, we need small SFM volumes and simple SFM structures. In this report we propose a micro-fabricated SFM device. We expect it to replace the cantilever, deflection detection unit and the scanner currently being used in traditional SFMs.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:604180095
Book学术官方微信