过渡金属二硫化物单层基上场效应晶体管传导通道长度的基本限制

М. Strikha, К. O. Коrzh
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引用次数: 0

摘要

本文对过渡金属二硫化物单层基片和不同源极/漏极触点材料上具有导通通道的场效应晶体管的功能极限进行了建模。在考虑势垒实际形式的情况下,计算了通道势垒的量子力学透明度。结果表明,具有4 nm n-MoS2通道和MoS2(金属改性)源极/漏极触点的FET在相对较低的栅极和漏极电压范围内(势垒透明度低于1 / 2)保持了高水平的功能。具有Pt源极/漏极触点的类似FET,当肖特基势垒本质上较高而势垒透明度本质上较低时,在2 nm通道以及栅极和漏极电压的所有实际值下保持其功能。具有p-WSe2通道和Pd触点的FET也得到了类似的结果。结果证实了在2 ~ 4nm超短通道MoS2 n型场效应管和WSe2 p型场效应管上实现互补逆变器的可能性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
FUNDAMENTAL LIMITS FOR THE LENGTH OF CONDUCTION CHANNEL IN THE FET ON TRANSITION METALS DICHALCOGENIDE SINGLE LAYER BASE
The modeling of the limits of functionality for the FET with conduction channel on transition metals dichalcogenide single layer base and with different source/drain contacts material was performed in this article. The quantum mechanical transparency of the channel barrier was calculated with allowance for the realistic form of the barrier potential. It is demonstrated, that the FET with 4-nm channel of n-MoS2 and MoS2 (metallic modification) source/drain contacts retains high level of functionality for the range of comparatively low gate and drain voltages (the barrier transparency is lower than ½). The similar FET with Pt source/drain contacts, when Schottky barrier is essentially higher and the barrier transparency is essentially lower, keep it’s functionality for the 2 nm channel as well for all the realistic values of gate and drain voltages. The similar result was obtained for the FET with p-WSe2 channel and Pd contacts as well. The obtained estimations confirm the possibility of the complementary inverter on MoS2 n-type FET and WSe2 p-type FET with ultra-short channels in 2–4 nm range.
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