用于状态监测的高通带平面度微机械电容振动传感器

2020 IEEE Eurasia Conference on IOT, Communication and Engineering (ECICE) Pub Date : 2020-10-23 DOI:10.1109/ECICE50847.2020.9301966

Chung-Yang Sue, C. Hsiao, Che-Kai Yeh

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引用次数: 1

摘要

本文提出了一种用于机床状态监测的微加工电容式振动传感器。对传感元件设计、读出电路、系统模块设计和实验结果进行了研究。所提出的振动监测系统采用系统FIR补偿滤波器，提高了通带频率的平坦度，使传感器在不同激励频率下的输出幅值保持在一个常数附近。补偿后的MEMS振动传感器通带平整度约为7.5% with the 5kHz bandwidth and the noise density is about $31\mu g/\sqrt {Hz} $. Finally, the vibration sensor is characterized and verified by the metal milling process for the performance and the feasibility for machine condition-based monitoring.

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Micromachined Capacitive Vibration Sensor with High Passband Flatness for Condition Based Monitoring

A micromachined capacitive vibration sensor is proposed in this work for machine tool condition monitoring. The sensing element design, readout circuit, system module design, and experimental results are also investigated. A systematic FIR compensation filter for the proposed vibration monitoring system enhances the flatness of the passband frequency so that the output amplitude of the sensor keeps near a constant under different excitation frequencies. The passband flatness of the compensated MEMS vibration sensor is about 7.5% with the 5kHz bandwidth and the noise density is about $31\mu g/\sqrt {Hz} $. Finally, the vibration sensor is characterized and verified by the metal milling process for the performance and the feasibility for machine condition-based monitoring.

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2020 IEEE Eurasia Conference on IOT, Communication and Engineering (ECICE)

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