衰老机制的相互依赖

H. Amrouch, Victor M. van Santen, T. Ebi, Volker Wenzel, J. Henkel
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引用次数: 79

摘要

随着纳米技术的深入,晶体管对负/正偏置温度不稳定性(NBTI/PBTI)和热载流子诱导降解(HCID)等老化机制的敏感性越来越高。事实上,在晶体管的栅极介质中,不同的老化机制同时发生。此外,与高k材料相结合的结垢使得通常被认为可以忽略的老化机制(例如,NMOS中的PBTI和PMOS中的HCID)变得明显。因此,在本文中,我们研究了为设计人员提供一个抽象但准确的可靠性估计的关键挑战,从物理到系统级别,结合多个同时老化机制及其相互依赖性的影响。我们表明,整体老龄化可以被建模为相互依赖的老龄化效应的叠加。我们提出的模型与最近的工业物理测量值偏差约6%。我们从实验中得出结论,在当前和即将到来的技术节点中,单独治疗个体衰老机制不足以制定有效的缓解策略。我们还证明,估计由于单个主导老化机制而单独考虑单一类型故障的可靠性,正如目前最先进的主要焦点(例如,[28],[22]),可能导致平均低估75%。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Towards interdependencies of aging mechanisms
With technology in deep nano scale, the susceptibility of transistors to various aging mechanisms such as Negative/ Positive Bias Temperature Instability (NBTI/PBTI) and Hot Carrier Induced Degradation (HCID) etc. is increasing. As a matter of fact, different aging mechanisms simultaneously occur in the gate dielectric of a transistor. In addition, scaling in conjunction with high-K materials has made aging mechanisms, that have often been assumed to be negligible (e.g., PBTI in NMOS and HCID in PMOS), become noticeable. Therefore, in this paper we investigate the key challenge of providing designers with an abstracted, yet accurate reliability estimation that combines, from the physical to system level, the effects of multiple simultaneous aging mechanisms and their interdependencies. We show that the overall aging can be modeled as a superposition of the interdependent aging effects. Our presented model deviates by around 6% from recent industrial physical measurements. We conclude from our experiments that an isolated treatment of individual aging mechanisms is insufficient to devise effective mitigation strategies in current and upcoming technology nodes. We also demonstrate that estimating reliability due to an individual dominant aging mechanism together with solely considering a single kind of failures, as currently is a main focus of state-of-the-art (e.g., [28], [22]), can result in 75% underestimation on average.
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