软基上SU-8结构的制备与释放

2014 IEEE 2nd International Conference on Emerging Electronics (ICEE) Pub Date : 2014-12-01 DOI:10.1109/ICEMELEC.2014.7151147

Richa Mishra, T. K. Bhattacharyya, T. K. Maiti

{"title":"软基上SU-8结构的制备与释放","authors":"Richa Mishra, T. K. Bhattacharyya, T. K. Maiti","doi":"10.1109/ICEMELEC.2014.7151147","DOIUrl":null,"url":null,"abstract":"A recent trend in biosensors and biomedical devices is the fabrication of compact, high aspect ratio and free-standing biocompatible structures with application as force sensors, micro-needle-based drug delivery systems, array of chemical sensors, etc. SU-8 photoresist is a promising candidate to fulfill such structure. Poly(Dimethylsiloxane) has been used as the sacrificial layer to successfully release the SU-8 structures without the use of any specialized equipment, like a dicing saw.","PeriodicalId":186054,"journal":{"name":"2014 IEEE 2nd International Conference on Emerging Electronics (ICEE)","volume":"37 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2014-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"Fabrication and release of SU-8 structures on soft substrate\",\"authors\":\"Richa Mishra, T. K. Bhattacharyya, T. K. Maiti\",\"doi\":\"10.1109/ICEMELEC.2014.7151147\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A recent trend in biosensors and biomedical devices is the fabrication of compact, high aspect ratio and free-standing biocompatible structures with application as force sensors, micro-needle-based drug delivery systems, array of chemical sensors, etc. SU-8 photoresist is a promising candidate to fulfill such structure. Poly(Dimethylsiloxane) has been used as the sacrificial layer to successfully release the SU-8 structures without the use of any specialized equipment, like a dicing saw.\",\"PeriodicalId\":186054,\"journal\":{\"name\":\"2014 IEEE 2nd International Conference on Emerging Electronics (ICEE)\",\"volume\":\"37 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2014-12-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2014 IEEE 2nd International Conference on Emerging Electronics (ICEE)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICEMELEC.2014.7151147\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2014 IEEE 2nd International Conference on Emerging Electronics (ICEE)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICEMELEC.2014.7151147","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 3

摘要

生物传感器和生物医学器件的最新趋势是制造紧凑，高纵横比和独立的生物相容性结构，应用于力传感器，微针为基础的药物输送系统，化学传感器阵列等。SU-8光刻胶是实现这种结构的理想材料。聚(二甲基硅氧烷)已被用作牺牲层，以成功释放SU-8结构，而无需使用任何专门的设备，如切丁锯。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Fabrication and release of SU-8 structures on soft substrate

A recent trend in biosensors and biomedical devices is the fabrication of compact, high aspect ratio and free-standing biocompatible structures with application as force sensors, micro-needle-based drug delivery systems, array of chemical sensors, etc. SU-8 photoresist is a promising candidate to fulfill such structure. Poly(Dimethylsiloxane) has been used as the sacrificial layer to successfully release the SU-8 structures without the use of any specialized equipment, like a dicing saw.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

2014 IEEE 2nd International Conference on Emerging Electronics (ICEE)

自引率

0.00%

发文量