软基上SU-8结构的制备与释放

Richa Mishra, T. K. Bhattacharyya, T. K. Maiti
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引用次数: 3

摘要

生物传感器和生物医学器件的最新趋势是制造紧凑,高纵横比和独立的生物相容性结构,应用于力传感器,微针为基础的药物输送系统,化学传感器阵列等。SU-8光刻胶是实现这种结构的理想材料。聚(二甲基硅氧烷)已被用作牺牲层,以成功释放SU-8结构,而无需使用任何专门的设备,如切丁锯。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Fabrication and release of SU-8 structures on soft substrate
A recent trend in biosensors and biomedical devices is the fabrication of compact, high aspect ratio and free-standing biocompatible structures with application as force sensors, micro-needle-based drug delivery systems, array of chemical sensors, etc. SU-8 photoresist is a promising candidate to fulfill such structure. Poly(Dimethylsiloxane) has been used as the sacrificial layer to successfully release the SU-8 structures without the use of any specialized equipment, like a dicing saw.
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