6.5 kV场屏蔽阳极(FSA)二极管概念，最大工作温度150℃

2018 IEEE 30th International Symposium on Power Semiconductor Devices and ICs (ISPSD) Pub Date : 2018-05-13 DOI:10.1109/ISPSD.2018.8393594

B. Boksteen, C. Papadopoulos, D. Prindle, A. Kopta, C. Corvasce

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引用次数: 2

摘要

在本文中，我们提出了一种低泄漏电流6.5 kV的场屏蔽阳极(FSA)二极管，具有高正向偏置安全工作区域(FBSOA)坚固性，能够在高达150°C的环境下可靠工作。这是通过优化结端、该区域与活性区域之间的电阻区(RZ)和选择性浅离子照射来实现局部寿命控制。因此，该二极管保持或超过了6.5 kV载波轴向寿命(CAL)二极管设定的柔软度、浪涌电流和FBSOA能力，同时还将其(125°C)泄漏电流降低了4倍以上，达到了通常与低泄漏发射极效率控制(EMCON)相关的概念。

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6.5 kV field shielded anode (FSA) diode concept with 150C maximum operational temperature capability

In this paper we present a low leakage current 6.5 kV field shielded anode (FSA) diode with high forward bias safe operating area (FBSOA) ruggedness capable of reliable operation up to 150 °C. This is achieved through optimization of the junction termination, the resistive zone (RZ) between this area and the active region and selective shallow ion irradiation for local lifetime control. As a result, the diode maintains or exceeds the softness, surge current and FBSOA capabilities set by the 6.5 kV carrier axial lifetime (CAL) diode, while also reducing its (125 °C) leakage current by more than 4 times achieving magnitudes typically associated with low leakage emitter efficiency control (EMCON) based concepts.

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来源期刊

2018 IEEE 30th International Symposium on Power Semiconductor Devices and ICs (ISPSD)

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