优化的富锗GST壁型PCM器件的高温可靠性

J. Kluge, G. Navarro, V. Sousa, N. Castellani, S. Blonkowski, R. Annunziata, P. Zuliani, L. Perniola
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引用次数: 6

摘要

研究了优化后的富锗GST壁型相变存储器(PCM)器件在高温下的可靠性。在175°C下,可确保超过107次循环的耐久性。演示了比标准GST器件高45%的电池热阻,减少了电池间的热串扰。温度升高对编程速度的影响有限。最后,提出了特定的编程顺序,以减少高温下中间电阻状态的漂移。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
High Operating Temperature Reliability of Optimized Ge-Rich GST Wall PCM Devices
The reliability of optimized Ge-rich GST "Wall" Phase Change Memory (PCM) devices is investigated at high operating temperatures. Endurance of more than 107 cycles is ensured up to 175 °C. A cell thermal resistance 45% higher wrt standard GST devices is demonstrated, granting reduced cell to cell thermal crosstalk. Increased temperatures show to have a limited impact on the programming speed. Finally, specific programming sequences are proposed to reduce the drift of intermediate resistance states at high temperature.
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