基于红外锁定传感的SiC肖特基二极管在特定工作条件下表面薄弱点的研究

J. Leon, X. Perpiñà, M. Vellvehí, X. Jordà, P. Godignon
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引用次数: 1

摘要

采用红外锁定热成像技术对几种碳化硅肖特基势垒二极管(sbd)进行了检测,以研究和确定由于其制造和电热应力测试而产生的结构弱点的来源。这些点按照代表其操作条件的三种不同方法进行频率调制,并通过其红外发射检测,因为它们表现为热点。这些弱点可能是由于焊线过程造成的屏障改变、金属化电接触不良导致的有源区电阻不均匀、边缘端高能注入造成的深能级陷阱以及热循环过程中内部裂纹扩展造成的。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Study of surface weak spots on SiC Schottky Diodes under specific operating regimes by Infrared Lock-in sensing
Several Silicon Carbide Schottky Barrier Diodes (SBDs) were inspected by Infrared Lock-In Thermography to study and determine the origin of structural weak spots resulting from their manufacturing and electro-thermal stressing tests. These spots are frequency modulated following three different approaches representative of their operating conditions and detected by their infrared emission, as they behave as hot spots. Such weak spots could have originated from barrier modification due to wire-bonding process, non-uniform active area resistance for bad metallization electrical contact, deep level traps creation due to high energy implantation in the edge termination, and internal crack propagation during thermal cycling.
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