基于柔性基板的聚合物倒装芯片技术——发展与应用

T. Seidowski, F. Kriebel, N. Neumann
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引用次数: 3

摘要

与传统的焊料倒装芯片技术相比,使用各向同性导电粘合剂进行碰撞和组装具有许多优点,例如简单而通用的工艺,较低的温度和环保。聚合物倒装芯片(PFC/sup TM/)技术需要合适的键合垫。常用的铝合金导致导电粘合剂的接触不稳定,因此迫切需要对PFC/sup TM/技术进行额外的碰撞下金属化。KSW Microtec开发了一种基于化学沉积钯的技术。金属化作为后端过程执行。焊盘沉积了厚度约为1 /spl μ m的均匀无针孔Pd薄膜,Al焊盘的金属化程度没有明显降低。由于钯的高贵特性,沉积膜表面不需要闪光镀金。与众所周知的Ni/Au过程相比,这简化了过程。导电胶粘剂与钯金属化之间的接触电阻等于或优于金/胶粘剂互连。作为PFC/sub TM/技术多功能性的一个例子,KSW Microtec生产的产品包括dycostrate芯片,带有丝网印刷聚合物轨道的柔性芯片和智能卡。还讨论了KSW Microtec在PFC/sup TM/技术的设置和鉴定方面的经验。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Polymer flip chip technology on flexible substrates-development and applications
Compared with classic solder flip chip technologies, the use of isotropic conductive adhesive for bumping and assembling results in a number of advantages such as a simple yet versatile process, lower temperatures and environmental friendliness. The polymer flip chip (PFC/sup TM/) technology requires suitable bond pads. The commonly used aluminum alloys result in unstable contacts for the conductive adhesives and hence there is an urgent need for an additional under-bump metallization for the PFC/sup TM/ technology. KSW Microtec has developed a technology which is based on electroless deposition of palladium. The metallization is executed as a back end process. The bond pads are deposited with a homogeneous and pin-hole free Pd thin film with a thickness of about 1 /spl mu/m without significant reduction of the Al bond pad metallization. The deposited film surface does not require flash gold metallization because of the noble characteristics of palladium. This simplifies the process in comparison to the well known Ni/Au process. The contact resistance between conductive adhesives and palladium metallization are equal to or better than gold/adhesive interconnections. As an example of the versatility of the PFC/sub TM/ technology, products manufactured by KSW Microtec include chip on dycostrate, chip on flex with screen printed polymer tracks, and smart cards. Experiences with the set-up and qualification of PFC/sup TM/ technology at KSW Microtec are also discussed.
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