基于感测放大的3D集成电路键合前片上TSV测试

Po-Yuan Chen, Cheng-Wen Wu, D. Kwai
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引用次数: 142

摘要

我们提出了一种新的测试方案,通过在键合前执行片上TSV监测,在3D IC中使用在DRAM上常见的感测放大技术。利用其固有的电容特性,可以在很小的面积开销下检测出故障的tsv。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
On-Chip TSV Testing for 3D IC before Bonding Using Sense Amplification
We present a novel testing scheme for TSVs in a 3D IC by performing on-chip TSV monitoring before bonding, using a sense amplification technique that is commonly seen on a DRAM. By virtue of the inherent capacitive characteristics, we can detect the faulty TSVs with little area overhead for the circuit under test.
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