Shi Cheng, A. Rydberg, P. Hallbjorner, L. Pettersson, Michael Salter, D. Platt
{"title":"集成在微机械低电阻硅基板上的毫米波锥形槽天线","authors":"Shi Cheng, A. Rydberg, P. Hallbjorner, L. Pettersson, Michael Salter, D. Platt","doi":"10.1109/IWAT.2009.4906949","DOIUrl":null,"url":null,"abstract":"This paper presents a millimeter-wave tapered slot antenna (TSA) for integration on a 325 μm thick low resistivity silicon substrate, using micromachining techniques. By suspending the radiator on a 5.5 mm x 1.5 mm large benzocyclobutene (BCB) membrane, good antenna performance is achieved at millimeter-wave frequencies. Port impedance and radiation patterns are studied numerically and experimentally. Measurements indicate that this antenna features good impedance matching (S11 ≪ −10 dB) and a gain of ≫ 4.6 dBi from 75 to 110 GHz. The measured results are in good agreement with numerical simulations.","PeriodicalId":166472,"journal":{"name":"2009 IEEE International Workshop on Antenna Technology","volume":"12 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2009-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":"{\"title\":\"Millimeter-wave tapered slot antenna for integration on micromachined low resistivity silicon substrates\",\"authors\":\"Shi Cheng, A. Rydberg, P. Hallbjorner, L. Pettersson, Michael Salter, D. Platt\",\"doi\":\"10.1109/IWAT.2009.4906949\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper presents a millimeter-wave tapered slot antenna (TSA) for integration on a 325 μm thick low resistivity silicon substrate, using micromachining techniques. By suspending the radiator on a 5.5 mm x 1.5 mm large benzocyclobutene (BCB) membrane, good antenna performance is achieved at millimeter-wave frequencies. Port impedance and radiation patterns are studied numerically and experimentally. Measurements indicate that this antenna features good impedance matching (S11 ≪ −10 dB) and a gain of ≫ 4.6 dBi from 75 to 110 GHz. The measured results are in good agreement with numerical simulations.\",\"PeriodicalId\":166472,\"journal\":{\"name\":\"2009 IEEE International Workshop on Antenna Technology\",\"volume\":\"12 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2009-03-02\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"5\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2009 IEEE International Workshop on Antenna Technology\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IWAT.2009.4906949\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2009 IEEE International Workshop on Antenna Technology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IWAT.2009.4906949","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 5
摘要
本文提出了一种毫米波锥形缝隙天线(TSA)，该天线采用微加工技术集成在325 μm厚的低电阻硅衬底上。通过将散热器悬挂在5.5 mm x 1.5 mm的大苯并环丁烯(BCB)膜上，可以在毫米波频率下实现良好的天线性能。对端口阻抗和辐射模式进行了数值和实验研究。测量结果表明，该天线具有良好的阻抗匹配(S11≪−10 dB)，在75至110 GHz范围内的增益为4.6 dBi。实测结果与数值模拟结果吻合较好。
Millimeter-wave tapered slot antenna for integration on micromachined low resistivity silicon substrates
This paper presents a millimeter-wave tapered slot antenna (TSA) for integration on a 325 μm thick low resistivity silicon substrate, using micromachining techniques. By suspending the radiator on a 5.5 mm x 1.5 mm large benzocyclobutene (BCB) membrane, good antenna performance is achieved at millimeter-wave frequencies. Port impedance and radiation patterns are studied numerically and experimentally. Measurements indicate that this antenna features good impedance matching (S11 ≪ −10 dB) and a gain of ≫ 4.6 dBi from 75 to 110 GHz. The measured results are in good agreement with numerical simulations.
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