激光多普勒振动法研究真空封装二维MEMS扫描仪的动力学

Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components Pub Date : 2014-03-07 DOI:10.1117/12.2037182

J. Janes, U. Hofmann

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引用次数: 2

摘要

2D MEMS扫描仪用于激光投影或激光雷达应用。静电驱动的扫描仪两轴的共振扭振导致激光从微镜反射的利萨焦轨迹。圆片级真空封装，倾斜玻璃封盖，确保低驱动电压下的高角振幅，同时防止对环境的影响。采用激光多普勒振动测量技术，通过测量二维MEMS扫描仪的扭振相关q值，分析了残余气体摩擦、压缩膜阻尼和内耗对二维MEMS扫描仪的影响。用振动测量法分析了扫描仪微镜和云台的振荡运动。识别了扫描结构的激励模式，从而产生耦合效应，影响二维MEMS反射镜的扫描性能。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Studies on the dynamics of vacuum encapsulated 2D MEMS scanners by laser Doppler vibrometry

2D MEMS scanners are used for e.g. Laser projection purposes or Lidar applications. Electrostatically driven resonant torsional oscillations of both axes of the scanners lead to Lissajous trajectories for Laser beams reflected from the micro mirror. Wafer level vacuum encapsulation with tilt glass capping ensures high angular amplitudes at low driving voltages additionally preventing environmental impacts. Applying Laser Doppler Vibrometry, the effect of residual gas friction, squeezed film damping and internal friction on 2D MEMS scanners is analyzed by measuring the Q-values associated with the torsional oscillations. Vibrometry is also used to analyze the oscillatory motion of the micro mirror and the gimbal of the scanners. Excited modes of the scanner structures are identified giving rise to coupling effects influencing the scanning performance of the 2D MEMS mirrors.

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Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components

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