{"title":"激光沉积Sr/sub x/Ba/sub 1-x/Nb/sub 2/O/sub 6/薄膜的MIM和MIS驻极体响应","authors":"H. Cheng, Gong-Shing Chiou, Kou-Shung Liu, I. Lin","doi":"10.1109/ISE.1996.578181","DOIUrl":null,"url":null,"abstract":"The pulsed laser deposition technique has been applied to synthesize Sr/sub x/Ba/sub 1-x/Nb/sub 2/O/sub 6/ (SBN: x=0.5) thin films. The polycrystalline phase of SBN films can be obtained only when the substrate temperature was higher than 680/spl deg/C. The crystalline texture can be modified when the oxygen pressure was varied. Both metal-insulator-metal (MIM) and metal-insulator-semiconductor (MIS) structures of films possess ferroelectric properties. Diffusive phase-transition characteristics of dielectric constant-temperature properties indicate that the SBN films possess a pyroelectric property. SBN films, therefore, have potential for electret research and application.","PeriodicalId":425004,"journal":{"name":"9th International Symposium on Electrets (ISE 9) Proceedings","volume":"33 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1996-09-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"MIM and MIS electret response of laser deposited Sr/sub x/Ba/sub 1-x/Nb/sub 2/O/sub 6/ thin films\",\"authors\":\"H. Cheng, Gong-Shing Chiou, Kou-Shung Liu, I. Lin\",\"doi\":\"10.1109/ISE.1996.578181\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The pulsed laser deposition technique has been applied to synthesize Sr/sub x/Ba/sub 1-x/Nb/sub 2/O/sub 6/ (SBN: x=0.5) thin films. The polycrystalline phase of SBN films can be obtained only when the substrate temperature was higher than 680/spl deg/C. The crystalline texture can be modified when the oxygen pressure was varied. Both metal-insulator-metal (MIM) and metal-insulator-semiconductor (MIS) structures of films possess ferroelectric properties. Diffusive phase-transition characteristics of dielectric constant-temperature properties indicate that the SBN films possess a pyroelectric property. SBN films, therefore, have potential for electret research and application.\",\"PeriodicalId\":425004,\"journal\":{\"name\":\"9th International Symposium on Electrets (ISE 9) Proceedings\",\"volume\":\"33 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1996-09-25\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"9th International Symposium on Electrets (ISE 9) Proceedings\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ISE.1996.578181\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"9th International Symposium on Electrets (ISE 9) Proceedings","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISE.1996.578181","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
MIM and MIS electret response of laser deposited Sr/sub x/Ba/sub 1-x/Nb/sub 2/O/sub 6/ thin films
The pulsed laser deposition technique has been applied to synthesize Sr/sub x/Ba/sub 1-x/Nb/sub 2/O/sub 6/ (SBN: x=0.5) thin films. The polycrystalline phase of SBN films can be obtained only when the substrate temperature was higher than 680/spl deg/C. The crystalline texture can be modified when the oxygen pressure was varied. Both metal-insulator-metal (MIM) and metal-insulator-semiconductor (MIS) structures of films possess ferroelectric properties. Diffusive phase-transition characteristics of dielectric constant-temperature properties indicate that the SBN films possess a pyroelectric property. SBN films, therefore, have potential for electret research and application.
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