用表面微加工技术制造悬臂式微动开关

Digest of Papers Microprocesses and Nanotechnology 2000. 2000 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.00EX387) Pub Date : 2000-07-11 DOI:10.1109/IMNC.2000.872631

K.M. Chang, C. F. Jou, J.J. Luo, L. Kuo, I. Deng, C. Liang, N. Luhmann

{"title":"用表面微加工技术制造悬臂式微动开关","authors":"K.M. Chang, C. F. Jou, J.J. Luo, L. Kuo, I. Deng, C. Liang, N. Luhmann","doi":"10.1109/IMNC.2000.872631","DOIUrl":null,"url":null,"abstract":"Cantilever type microswitches have advantages of low electrostatic actuation voltage and high isolation in RF applications. Of particular importance, they can be integrated with microstrip lines in series or shunt connection mode for building an RF circuit or system directly. This article presents an idea for a switch with a single pole, single throw configuration (SPST).","PeriodicalId":270640,"journal":{"name":"Digest of Papers Microprocesses and Nanotechnology 2000. 2000 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.00EX387)","volume":"153 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-07-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Fabrication of cantilever type microswitches using surface micromachining technology\",\"authors\":\"K.M. Chang, C. F. Jou, J.J. Luo, L. Kuo, I. Deng, C. Liang, N. Luhmann\",\"doi\":\"10.1109/IMNC.2000.872631\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Cantilever type microswitches have advantages of low electrostatic actuation voltage and high isolation in RF applications. Of particular importance, they can be integrated with microstrip lines in series or shunt connection mode for building an RF circuit or system directly. This article presents an idea for a switch with a single pole, single throw configuration (SPST).\",\"PeriodicalId\":270640,\"journal\":{\"name\":\"Digest of Papers Microprocesses and Nanotechnology 2000. 2000 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.00EX387)\",\"volume\":\"153 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2000-07-11\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Digest of Papers Microprocesses and Nanotechnology 2000. 2000 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.00EX387)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IMNC.2000.872631\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Digest of Papers Microprocesses and Nanotechnology 2000. 2000 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.00EX387)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IMNC.2000.872631","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 0

摘要

悬臂式微动开关在射频应用中具有静电致动电压低、隔离度高的优点。特别重要的是，它们可以以串联或并联的方式与微带线集成，以直接构建射频电路或系统。本文提出了一种单极单掷结构(SPST)开关的设计思路。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Fabrication of cantilever type microswitches using surface micromachining technology

Cantilever type microswitches have advantages of low electrostatic actuation voltage and high isolation in RF applications. Of particular importance, they can be integrated with microstrip lines in series or shunt connection mode for building an RF circuit or system directly. This article presents an idea for a switch with a single pole, single throw configuration (SPST).

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

Digest of Papers Microprocesses and Nanotechnology 2000. 2000 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.00EX387)

自引率

0.00%

发文量