硅基远红外测热计的不同像素模式

2017 Silicon Nanoelectronics Workshop (SNW) Pub Date : 2017-06-01 DOI:10.23919/SNW.2017.8242321

Feng-Renn Juang, W. Yeh, Wei-Chih Chen, Ming-Feng Chung

{"title":"硅基远红外测热计的不同像素模式","authors":"Feng-Renn Juang, W. Yeh, Wei-Chih Chen, Ming-Feng Chung","doi":"10.23919/SNW.2017.8242321","DOIUrl":null,"url":null,"abstract":"Amorphous silicon bolometers with different pixel patterns are investigated for far infrared detection. Devices with floating resonator structure are measured for resistances and temperature coefficient of resistance (TCR) values. The results show normal leg geometry has high TCR (∼ −4%/°C) and moderate resistance. Thus the pixel pattern is suitable for infrared detecting applications.","PeriodicalId":424135,"journal":{"name":"2017 Silicon Nanoelectronics Workshop (SNW)","volume":"49 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2017-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Different pixel patterns of Si-based far infrared bolometers\",\"authors\":\"Feng-Renn Juang, W. Yeh, Wei-Chih Chen, Ming-Feng Chung\",\"doi\":\"10.23919/SNW.2017.8242321\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Amorphous silicon bolometers with different pixel patterns are investigated for far infrared detection. Devices with floating resonator structure are measured for resistances and temperature coefficient of resistance (TCR) values. The results show normal leg geometry has high TCR (∼ −4%/°C) and moderate resistance. Thus the pixel pattern is suitable for infrared detecting applications.\",\"PeriodicalId\":424135,\"journal\":{\"name\":\"2017 Silicon Nanoelectronics Workshop (SNW)\",\"volume\":\"49 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2017-06-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2017 Silicon Nanoelectronics Workshop (SNW)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.23919/SNW.2017.8242321\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2017 Silicon Nanoelectronics Workshop (SNW)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.23919/SNW.2017.8242321","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 0

摘要

研究了具有不同像元模式的非晶硅热辐射计在远红外探测中的应用。测量了浮腔结构器件的电阻和电阻温度系数(TCR)值。结果表明，正常的腿部几何形状具有高TCR(~ - 4%/°C)和中等阻力。因此，像素模式适用于红外探测应用。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Different pixel patterns of Si-based far infrared bolometers

Amorphous silicon bolometers with different pixel patterns are investigated for far infrared detection. Devices with floating resonator structure are measured for resistances and temperature coefficient of resistance (TCR) values. The results show normal leg geometry has high TCR (∼ −4%/°C) and moderate resistance. Thus the pixel pattern is suitable for infrared detecting applications.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

2017 Silicon Nanoelectronics Workshop (SNW)

自引率

0.00%

发文量