用于过程和设备仿真的网格生成系统

[1988] IEEE International Conference on Computer-Aided Design (ICCAD-89) Digest of Technical Papers Pub Date : 1988-11-07 DOI:10.1109/ICCAD.1988.122475

Akio Yajima, Hirofumi Jonishi, A. Maruyama

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引用次数: 1

摘要

提出了一种针对任意形状的三维区域(如LOCOS(局部硅氧化)隔离区、沟槽电池或用于下一代dram的堆叠电容器电池)数值生成边界拟合坐标系的方法。感兴趣的三维区域被分解成曲线有界曲面，这些曲面是由样条曲线定义的自由曲面。采用边界拟合坐标法生成曲面网格点，提高了算法的收敛性和精度。通过一系列的实例和在半导体工艺和器件仿真中的应用，说明了该系统的实用性

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A grid generation system for process and device simulation

A method for numerically generating boundary-fitted coordinate systems for arbitrarily shaped three-dimensional regions such as LOCOS (local oxidation of silicon) isolation regions, trench cells, or stacked capacitor cells for next-generation DRAMs is presented. The three-dimensional region of interest is decomposed into curve-bounded surfaces which are free-form surfaces defined by spline curves. Grid points for the surfaces are generated by the boundary-fitted coordinate method, which improves convergence and accuracy. The usefulness of this system is illustrated through a series of examples and applications in semiconductor process and device simulation.<>

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来源期刊

[1988] IEEE International Conference on Computer-Aided Design (ICCAD-89) Digest of Technical Papers

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