溶胶-凝胶自旋法制备氧化锌薄膜的纳米结构特征

H. Bahadur, A. Srivastava, S. Garg, P. Pal, S. Chandra
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引用次数: 3

摘要

ZnO薄膜在各种传感器件中得到应用。本文介绍了溶胶-凝胶自旋法制备ZnO薄膜的研究结果。以乙酸锌和硝酸锌为前驱体制备溶胶。由这些前体生长的薄膜表现出不同类型的形态。用乙酸锌生长的薄膜比用硝酸锌作为前驱体生长的薄膜具有更光滑的形貌特征。另一方面,以硝酸锌为前驱体,我们观察到了ZnO的纳米针状结构。这些针状结构可以作为制造压电细针尖的基础,用于扫描隧道光谱、原子力显微镜和其他传感器的实际应用
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Characterization of nanostructured features of thin films of zinc oxide grown by sol-gel spin process
Thin films of ZnO find application in various sensing devices. We present here the results of our studies on thin films of ZnO grown by sol-gel spin process. Zinc acetate and zinc nitrate were used as precursor materials for preparing the sols. The films grown by these precursors show different types of morphologies. The films grown using zinc acetate show much smoother topographical features than those grown using zinc nitrate as precursor materials. On the other hand, using the zinc nitrate as the precursor, we have observed the nanosized needles of ZnO. These needles could form the basis of fabrication of piezoelectric fine tips for a practical application in scanning tunneling spectroscopy and atomic force microscopy and other sensors
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