CMOS芯片的生命周期清单

Proceedings of the 2006 IEEE International Symposium on Electronics and the Environment, 2006. Pub Date : 2006-05-08 DOI:10.1109/ISEE.2006.1650071

Stephen P. Boyd, D. Dornfeld, N. Krishnan

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引用次数: 25

摘要

生命周期库存的比较评估的组合半导体器件类型是使用过程步骤相关的信息库组装。在本文中，我们展示了该库在工艺设备级和设施规模上的能源使用、材料投入和排放数据的结构，并对每个晶圆进行标准化。本文介绍了一种130纳米节点CMOS器件的案例研究结果，并将其与先前对同类芯片的研究进行了比较。比较了6层和8层CMOS器件对生产的影响

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Life Cycle Inventory of a CMOS Chip

A life cycle inventory for comparative assessment of assorted semiconductor device types is assembled using a library of process step-related information. In this paper, we present the structure of this library of energy use, material inputs and emissions data at the process equipment-level and facilities-scale, normalized per wafer. Selected results from a case study of a 130nm node CMOS device are presented and compared with a previous study of a comparable chip. Comparative production impacts of 6-layer and 8-layer CMOS devices are shown

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Proceedings of the 2006 IEEE International Symposium on Electronics and the Environment, 2006.

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