阿拉巴马A&M大学使用离子束的在线/原位掺杂监测设施

Ion Implantation Technology. 2002. Proceedings of the 14th International Conference on Pub Date : 1900-01-01 DOI:10.1109/IIT.2002.1258014

C. Muntele, I. Muntele, D. Ila, L. Holland, R. Zimmerman, D. Nisen, M. Schilloff

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摘要

本文介绍了阿拉巴马A&M大学材料辐照中心(CIM-AAMU)现有离子束设施升级项目的设计和特点。我们打算将离子加速器的零度输出与离子注入器的低能量输出结合在一个共同的腔室中。最终确定后，该设施将允许在线/原位样品修改和表征。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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In-line/in-situ doping monitoring facility using ion beams at Alabama A&M University

Here we present the design and features of the project of upgrading the existing ion beam facilities available at the Center for Irradiation of Materials of Alabama A&M University (CIM-AAMU). We intend to join the zero degrees output of the ion accelerator with the low energy output of the ion implanter in a common chamber. When finalized, the facility will allow in-line/in-situ sample modification and characterization.

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Ion Implantation Technology. 2002. Proceedings of the 14th International Conference on

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