利用SU-8机构和一推式操作在SOI晶圆上组装微镜

2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics Pub Date : 2008-08-26 DOI:10.1109/OMEMS.2008.4607853

Y. Chiu, Wei-Zhi Huang, Jhong-Wei Wu, J. Chiou, H. Shieh

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引用次数: 1

摘要

微镜是用一推操作组装在绝缘体上的硅晶圆上的。该技术可以通过自动化设备降低微系统装配的整体复杂性。新的SU-8机构也被展示。

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Assembly of micro mirrors on SOI wafers using SU-8 mechanisms and one-push operation

Micro mirrors are assembled on silicon-on-insulator wafers using one-push operation. The proposed technique can reduce the overall complexity of micro system assembly by using automated equipments. Novel SU-8 mechanisms are also demonstrated.

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2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics

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