{"title":"C-V顾问知识库(CVA-KB):一个高频C-V图分析工具","authors":"B. Anders","doi":"10.1109/IMTC.1991.161658","DOIUrl":null,"url":null,"abstract":"A high-frequency capacitance-voltage (C-V) plot analysis tool, the CVA-KB, has been developed using an expert system shell. The CVA-KB is designed to be used by semiconductor diffusion engineers and technicians to help solve problems with the interpretation of C-V plots and to suggest a course of action in the solution of diffusion area problems as revealed by C-V analysis. The CVA-KB also aids in the training of C-V plot interpretation by providing a context-sensitive on-line help system.<<ETX>>","PeriodicalId":439545,"journal":{"name":"[1991] Conference Record. IEEE Instrumentation and Measurement Technology Conference","volume":"86 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1991-05-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"C-V advisor knowledge base (CVA-KB): a high frequency C-V plot analysis tool\",\"authors\":\"B. Anders\",\"doi\":\"10.1109/IMTC.1991.161658\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A high-frequency capacitance-voltage (C-V) plot analysis tool, the CVA-KB, has been developed using an expert system shell. The CVA-KB is designed to be used by semiconductor diffusion engineers and technicians to help solve problems with the interpretation of C-V plots and to suggest a course of action in the solution of diffusion area problems as revealed by C-V analysis. The CVA-KB also aids in the training of C-V plot interpretation by providing a context-sensitive on-line help system.<<ETX>>\",\"PeriodicalId\":439545,\"journal\":{\"name\":\"[1991] Conference Record. IEEE Instrumentation and Measurement Technology Conference\",\"volume\":\"86 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1991-05-14\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"[1991] Conference Record. IEEE Instrumentation and Measurement Technology Conference\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IMTC.1991.161658\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"[1991] Conference Record. IEEE Instrumentation and Measurement Technology Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IMTC.1991.161658","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
C-V advisor knowledge base (CVA-KB): a high frequency C-V plot analysis tool
A high-frequency capacitance-voltage (C-V) plot analysis tool, the CVA-KB, has been developed using an expert system shell. The CVA-KB is designed to be used by semiconductor diffusion engineers and technicians to help solve problems with the interpretation of C-V plots and to suggest a course of action in the solution of diffusion area problems as revealed by C-V analysis. The CVA-KB also aids in the training of C-V plot interpretation by providing a context-sensitive on-line help system.<>