阳极氧化铝膜制备微皿

2014 12th International Conference on Actual Problems of Electronics Instrument Engineering (APEIE) Pub Date : 2014-10-01 DOI:10.1109/APEIE.2014.7040828

B. Tzaneva, V. Videkov

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引用次数: 1

摘要

提出了一种在铜环上镀锡制备阳极氧化铝(AAO)膜的方法。它允许通过焊接创建封闭的微支架(微管)，具有发达的纳米结构表面。经典技术如光刻、电化学氧化和金属沉积、蚀刻和焊接。经红外光谱分析，该工艺方案制备的比色皿可以作为封闭体积的气体和挥发性液体，并指定光学传感器。

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Fabrication of microcuvettes using anodic aluminum oxide membrane

A variant for preparing an anodic aluminium oxide (AAO) membrane in copper ring with deposited tin last layer is proposed in the work. It allows to create closed microholders (microcuvettes) with developed nanostructured surface by soldering. Classical techniques as photolithography, electrochemical oxidation and metal deposition, etching and soldering was used. Is it approved by FTIR-analysis, that the prepared by proposed technological scheme cuvettes can be used as closed volumes containing gas and volatile liquids with designation of optical sensors.

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来源期刊

2014 12th International Conference on Actual Problems of Electronics Instrument Engineering (APEIE)

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