Il-soo Kim, S. Jeong, Sang-Sub Kim, Byung-Teak Lee
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Effects of low-temperature buffer layer on the quality of RF magnetron sputtering grown ZnO/Si films
Results of detailed characterization indicate that the PL emission and the microstructure of ZnO/Si films grown by RF magnetron sputtering are significantly improved by increasing growth temperature and inserting low temperature buffer layer.
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