一种用于表面积测量的智能测量系统

J. Puippe, A. Michalski, A. Kalicki, M. Grzybowski
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引用次数: 3

摘要

在电镀过程中,为了确定电流密度等重要参数,需要了解导电体的精确表面积。本文介绍了一种表面面积测量方法的基本原理。阐述了用限制扩散电流法测量导电体表面积的理论基础。介绍了一种基于DIM的智能表面积测量系统,包括硬件实现和软件实现。给出了测量系统的精度、局限性和适用范围等方面的实验结果。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
An intelligent measurement system for surface area measurement
Knowledge of the precise surface area of an electrically conducting body is needed in electroplating processes for determining important parameters such as current density. The main principals of a surface area measurement method are presented in this paper. A theoretical basis of the diffusion-limited current method (DIM) for measurement of the surface area of an electrically conducting body is explained. An intelligent measurement system for measuring surface area based on DIM is described, including realization of the hardware and software. Results of experiments concerning accuracy, limitations and implementation area of the measurement system are given.
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