激光辐照具有反射条纹结构的重结晶SOI薄膜温度分布的模拟

Proceedings of 4th International Conference on Solid-State and IC Technology Pub Date : 1995-10-24 DOI:10.1109/ICSICT.1995.503343

Hongwei Wang, Ji-sheng Zhang, Changqing Zhan, P. Tsien

{"title":"激光辐照具有反射条纹结构的重结晶SOI薄膜温度分布的模拟","authors":"Hongwei Wang, Ji-sheng Zhang, Changqing Zhan, P. Tsien","doi":"10.1109/ICSICT.1995.503343","DOIUrl":null,"url":null,"abstract":"A two-dimensional thermal analysis on laser induced recrystallization of SOI film with a reflective-stripe structure was made, indicating that the temperature distribution is related to laser power, scanning rate, high-reflective-region width, reflectivities of high- and low-reflective-regions and the alignment of the laser beam with the high-reflective-region.","PeriodicalId":286176,"journal":{"name":"Proceedings of 4th International Conference on Solid-State and IC Technology","volume":"10 3 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1995-10-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Simulation of temperature distribution in recrystallized SOI film with reflective-stripe structure by laser irradiation\",\"authors\":\"Hongwei Wang, Ji-sheng Zhang, Changqing Zhan, P. Tsien\",\"doi\":\"10.1109/ICSICT.1995.503343\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A two-dimensional thermal analysis on laser induced recrystallization of SOI film with a reflective-stripe structure was made, indicating that the temperature distribution is related to laser power, scanning rate, high-reflective-region width, reflectivities of high- and low-reflective-regions and the alignment of the laser beam with the high-reflective-region.\",\"PeriodicalId\":286176,\"journal\":{\"name\":\"Proceedings of 4th International Conference on Solid-State and IC Technology\",\"volume\":\"10 3 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1995-10-24\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of 4th International Conference on Solid-State and IC Technology\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICSICT.1995.503343\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of 4th International Conference on Solid-State and IC Technology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICSICT.1995.503343","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 0

摘要

对具有反射条纹结构的SOI薄膜进行了激光诱导再结晶的二维热分析，结果表明，激光诱导再结晶的温度分布与激光功率、扫描速率、高反射区宽度、高反射区反射率和低反射区反射率以及激光束与高反射区的对准有关。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Simulation of temperature distribution in recrystallized SOI film with reflective-stripe structure by laser irradiation

A two-dimensional thermal analysis on laser induced recrystallization of SOI film with a reflective-stripe structure was made, indicating that the temperature distribution is related to laser power, scanning rate, high-reflective-region width, reflectivities of high- and low-reflective-regions and the alignment of the laser beam with the high-reflective-region.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

Proceedings of 4th International Conference on Solid-State and IC Technology

自引率

0.00%

发文量