CNT Metamaterial Fabrication 3D Printing Mask Process

The demand for clean energy is rising with the global population. Renewable energy sources, such as solar, will play a key role in the years ahead. Solar energy has a key problem with energy storage as the energy produced during peak solar hours must be used immediately or stored. Carbon Nanotubes (CNTs) have unique electrostatic properties, similar to metals, capable of producing and storing electric energy in the form of a capacitor. The CNTs are to be arranged in a pattern using 3D printing to generate a Split Ring Resonator (SRR) metamaterial. Past research has shown generating CNT SRR patterns is possible using a Focused Ion Beam (FIB). FIB allows for limited sample size to be patterned for CNT growth. On the other hand, 3D printed shadow masks enable SRR patterns on a larger sample size. Today’s 3D printing technology cannot achieve the same resolution as FIB patterning yet are capable of producing larger samples. In the present research, a 3D model of a shadow mask with the desired SRR pattern was created using Fusion 360 and printed using Phrozen Sonic Mini 8K 3D printer. For the CNT synthesis process, first, heat-treated Silicon Oxide substrate was placed into a RF magnetic sputtering to deposit the first catalyst film of Aluminum Oxide using Argon plasma. The sample then was removed from the chamber to place the mask on and placed back in to sputter an Iron catalyst layer. The sample was then taken to a thermal catalytic chemical vapor deposition (CVD) chamber in which it was annealed to 730° C and afterwards exposed to acetylene gas to generate CNTs.