各向异性晶体蚀刻的计算机模拟

TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers Pub Date : 1991-06-24 DOI:10.1109/SENSOR.1991.149005

C. Séquin

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引用次数: 77

摘要

研究了晶体物质各向异性蚀刻所产生的几何形状。建立了一个模拟器，从蚀刻速率极坐标图出发，构建了多面体模型的边界表示。特别注意那些以前不存在的新面孔出现的情况。

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Computer simulation of anisotropic crystal etching

The geometrical shapes resulting from anisotropic etching of crystalline substances are investigated. A simulator has been built that constructs boundary representations of the polyhedral models of such shapes starting from an etch rate polar diagram. Special attention is given to situations in which new faces emerge that were not previously present.<>

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TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers

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