J.J. Tullstall, S. Taylor, R. Syms, T. Tate, M.M. Ahmad
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Silicon micromachined mass filter for a low power, low cost quadrupole mass spectrometer
This article considers the design, realisation and initial tests of a quadrupole mass spectrometer with a novel silicon micromachined mass filter. The construction of this device is discussed along with its mounting on a conventional ion source and testing in a vacuum system. Results are presented for the operation of this mass lens including a mass spectrum, and the effect of cage voltage, emission current and pressure on the performance.
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