横向磁通集成电容器的容量限制和匹配特性

Proceedings of the IEEE 2001 Custom Integrated Circuits Conference (Cat. No.01CH37169) Pub Date : 2001-05-09 DOI:10.1109/CICC.2001.929803

R. Aparicio, A. Hajimiri

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引用次数: 27

摘要

计算了横向磁通电容器和准分形电容器的电容密度的理论极限。这些限制被用来研究各种电容结构的效率，如横向通量和准分形结构。该研究导致了两种具有高横向场效率的新型电容器结构。仿真和实验结果表明，与标准水平平行板电容器和先前报道的侧场电容器相比，该电容器具有更高的容量和更好的匹配性能。

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Capacity limits and matching properties of lateral flux integrated capacitors

Theoretical limits for the capacitance density of lateral flux and quasi-fractal capacitors are calculated. These limits are used to investigate the efficiency of various capacitive structures such as lateral flux and quasi-fractal structures. This study leads to two new capacitor structures with high lateral field efficiency. Simulation and experimental results demonstrate higher capacity and superior matching properties compared to the standard horizontal parallel plate and previously reported lateral-field capacitors.

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Proceedings of the IEEE 2001 Custom Integrated Circuits Conference (Cat. No.01CH37169)

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