芯片封装相互作用对大芯片倒装封装中Cu/超低k互连分层的影响

C. Uchibori, Michael Lee
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引用次数: 5

摘要

采用力学和热分析方法研究了倒装芯片中Cu/超低k互连中芯片尺寸对芯片相互作用的影响。分析和理论研究表明,模具尺寸效应不仅仅是由模具和衬底之间的CTE不匹配引起的。通过考虑焊接焊料的数量及其在冷却过程中的力学性能,成功地证明了CPI的模具尺寸依赖性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Impact of chip package interaction on Cu/Ultra low-k interconnect delamination in Flip Chip Package with large die
Die size effects on Chip Package Interaction for Cu/Ultra low-k interconnect in Flip Chip Package were investigated using mechanical and thermal analysis. The analytical and the theoretical study suggested that the die size effects were not caused only by the mismatch in CTE between die and substrate. By considering the number of bonding solder and its mechanical property during the cooling process, the die size dependency of CPI was successfully demonstrated.
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