用于火灾和火焰探测和目标识别的双波段紫外/红外光学传感器

D. Starikov, C. Boney, R. Pillai, A. Bensaoula
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引用次数: 21

摘要

一些军事和工业应用需要同时或至少在空间上同步检测不同光谱区域的光发射。在硅晶片上生长III氮化物的能力被认为是开发从紫外到红外波长的多色探测器的关键。在Si晶片上生长的GaN/InGaN p-n异质结构在近紫外到近红外的宽光谱范围内具有灵敏度。采用基于AlGaN合金的肖特基势垒光电二极管结构,可以将光谱灵敏度进一步扩展到有利于太阳盲感测的紫外范围。本文讨论了利用市售的蓝宝石上硅(SOS)晶圆结合分离红外(由硅提供)和紫外(以III氮化物为特征)波段灵敏度的另一种方法。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Dual-band UV/IR optical sensors for fire and flame detection and target recognition
Several military and industrial applications require simultaneous or at least spatially synchronized detection of optical emissions in different spectral regions. The ability to grow III nitrides on Si wafers is considered to be key to the development of multi-color detectors ranging from the UV to IR wavelengths. GaN/InGaN p-n heterostructures grown on Si wafers indicated sensitivity in a wide spectral range from near UV to near IR. Employment of Schottky barrier photodiode structures based on AlGaN alloys allows extension of the spectral sensitivity further into the UV range beneficial for solar-blind sensing. An alternative way to combine sensitivities in separated IR (provided by silicon) and UV (featured by III nitrides) bands by employment of commercially available silicon-on sapphire (SOS) wafers is discussed.
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