simple中清洗枪PFN的设计与测试

2011 IEEE International Vacuum Electronics Conference (IVEC) Pub Date : 2011-02-21 DOI:10.1109/IVEC.2011.5747086

Priyavandna J. Rathod, V. Anitha, Z. H. Sholapurwala, J. Raval, R. Bahl, Y. Saxena

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引用次数: 2

摘要

在SYMPLE (SYstem for Microwave plasma Experiments)中，设计、开发并测试了具有互耦合的脉冲形成网络(PFN)作为脉冲(~ 100µs)高压(高达10 KV)源用于洗涤枪等离子体生产的性能。本文详细介绍了PFN参数以及等离子体放电产生的试验结果。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Design and testing of a PFN for the washer-gun in SYMPLE

A Pulse Forming Network (PFN) with mutual coupling has been designed, developed and tested for its performance as a pulsed (∼ 100 µs) high voltage (up to 10 KV) source for washer gun plasma production in SYMPLE (SYstem for Microwave PLasma Experiments). Detailed account of the PFN parameters as well as the test results on plasma discharge production is presented here.

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2011 IEEE International Vacuum Electronics Conference (IVEC)

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