用于压敏传感的大块纳米晶石墨薄膜

2019 International Semiconductor Conference (CAS) Pub Date : 2019-10-01 DOI:10.1109/SMICND.2019.8923644

O. Simionescu, E. Anghel, R. Popa, C. Pachiu, R. Gavrila, F. Comanescu, A. Avram, G. Dinescu

{"title":"用于压敏传感的大块纳米晶石墨薄膜","authors":"O. Simionescu, E. Anghel, R. Popa, C. Pachiu, R. Gavrila, F. Comanescu, A. Avram, G. Dinescu","doi":"10.1109/SMICND.2019.8923644","DOIUrl":null,"url":null,"abstract":"Bulk nanocrystalline graphite has been investigated as a possible candidate for piezoresistive sensors. Several thin films have been grown by PECVD and investigated through various techniques: Raman spectroscopy, electrical characterization, AFM, profilometry and spectroscopic ellipsometry. After a careful analysis of our findings we have weighted the use of the material as a piezoresistive sensor and made a goal for future research.","PeriodicalId":151985,"journal":{"name":"2019 International Semiconductor Conference (CAS)","volume":"37 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Bulk nanocrystalline graphite thin films for piezorezistive sensing applications\",\"authors\":\"O. Simionescu, E. Anghel, R. Popa, C. Pachiu, R. Gavrila, F. Comanescu, A. Avram, G. Dinescu\",\"doi\":\"10.1109/SMICND.2019.8923644\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Bulk nanocrystalline graphite has been investigated as a possible candidate for piezoresistive sensors. Several thin films have been grown by PECVD and investigated through various techniques: Raman spectroscopy, electrical characterization, AFM, profilometry and spectroscopic ellipsometry. After a careful analysis of our findings we have weighted the use of the material as a piezoresistive sensor and made a goal for future research.\",\"PeriodicalId\":151985,\"journal\":{\"name\":\"2019 International Semiconductor Conference (CAS)\",\"volume\":\"37 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-10-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2019 International Semiconductor Conference (CAS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SMICND.2019.8923644\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2019 International Semiconductor Conference (CAS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SMICND.2019.8923644","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 2

摘要

大块纳米晶石墨作为压阻式传感器的可能候选材料已被研究。PECVD已经生长了几种薄膜，并通过各种技术进行了研究:拉曼光谱、电学表征、原子力显微镜、轮廓术和光谱椭偏仪。在仔细分析了我们的发现之后，我们权衡了该材料作为压阻式传感器的使用，并为未来的研究制定了目标。

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Bulk nanocrystalline graphite thin films for piezorezistive sensing applications

Bulk nanocrystalline graphite has been investigated as a possible candidate for piezoresistive sensors. Several thin films have been grown by PECVD and investigated through various techniques: Raman spectroscopy, electrical characterization, AFM, profilometry and spectroscopic ellipsometry. After a careful analysis of our findings we have weighted the use of the material as a piezoresistive sensor and made a goal for future research.

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2019 International Semiconductor Conference (CAS)

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