一种新的多电平快闪存储器中陷阱阈值电压漂移分析方法

R. Yamada, T. Sekiguchi, Y. Okuyama, J. Yugami, H. Kume
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引用次数: 31

摘要

为了提高闪存的保留特性,我们研究了隧道氧化物中电荷脱陷引起的阈值电压漂移(/spl Delta/V/sub /)。因此,我们提出了一个新的参数来揭示脱陷的主要来源(空穴/电子)和脱陷质心。我们发现,根据隧道氧化物降解的程度,脱陷的主要来源从空穴转变为电子。由于孔脱除增加了编程存储单元的V/sub - th/,因此必须考虑这种V/sub - th/的增加,特别是在设计多级闪存时。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
A novel analysis method of threshold voltage shift due to detrap in a multi-level flash memory
With the aim of improving flash-memory retention characteristics, we investigated threshold voltage shift (/spl Delta/V/sub th/) due to charge detrapping from the tunnel oxide. Accordingly, we propose a new parameter that can reveal the main origin of detrapping (hole/electron) and the detrap centroid. We found that the main origin of detrapping changes from holes to electrons depending on the degree of tunnel-oxide degradation. Since the hole detrapping increases V/sub th/ of a programmed memory cell, this V/sub th/ increase must be considered, especially when designing a multi-level flash memory.
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