激光扫描显微镜热载流子发光测量

Proceedings of the 2000 Third IEEE International Caracas Conference on Devices, Circuits and Systems (Cat. No.00TH8474) Pub Date : 2000-03-15 DOI:10.1109/ICCDCS.2000.869857

R. Zappa, F. Zappa, M. Ghioni, U. Drodofsky

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引用次数: 0

摘要

本文首次在激光扫描显微镜(LSM)上应用了固态单光子雪崩探测器(SPADs)。这些器件改善了LSM在微电子器件和电路检测中的性能，增强了最终图像的深度识别和对比度。由于SPAD器件的高灵敏度，还可以设想LSM的创新应用，用于测量微电子器件发出的弱可见光和近红外发光。

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Hot-carrier luminescence measurements by means of laser scanning microscopy

We employed for the first time solid-state single photon avalanche detectors (SPADs) in a laser scanning microscope (LSM). These devices led to an improvement of the LSM performances in the inspection of microelectronic devices and circuits, enhancing the obtainable depth discrimination and contrast of the final image. Thanks to the high sensitivity of SPAD devices, it was also possible to envisage an innovative application of LSM for measuring the weak visible and near-infrared luminescence emitted by microelectronic devices.

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Proceedings of the 2000 Third IEEE International Caracas Conference on Devices, Circuits and Systems (Cat. No.00TH8474)

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