LiTaO3 LFE体声波传感器不同工作模式的比较

2011 Symposium on Piezoelectricity, Acoustic Waves and Device Applications (SPAWDA) Pub Date : 2011-12-01 DOI:10.1109/SPAWDA.2011.6167194

T. Ma, Ji Wang, Chao Zhang, R. Wu

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引用次数: 0

摘要

先前的研究表明，在液体中工作时，(yxl)90°LiTaO3 LFE器件工作在纯LFE模式(观测到的体声波由侧场激发)，(yxl)0°LiTaO3 LFE器件工作在伪LFE模式(观测到的体声波不是由侧场激发，而是由厚度场激发，液体作为虚电极)。在本工作中，设计和制作了两种模式下的LiTaO3 LFE器件。测试和比较了器件对液体电导率和介电常数的灵敏度。实验结果表明，与纯LiTaO3 - lfe器件相比，LiTaO3伪lfe器件对液体电性质变化的灵敏度要高得多。

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Comparison of different operational modes on LiTaO3 LFE bulk acoustic wave sensors

Previous studies have shown that when working in liquid, (yxl)90° LiTaO3 LFE devices work on pure-LFE mode (the observed bulk acoustic wave is excited by the lateral field) and (yxl)0° LiTaO3 LFE devices work on pseudo-LFE mode (the observed bulk acoustic wave is not excited by the lateral field but the thickness field with the liquid acting as an virtual electrode). In this work, LiTaO3 LFE devices on both modes are designed and fabricated. The devices' sensitivities to liquid conductivity and permittivity were tested and compared. The experimental results showed that compared to the LiTaO3 pure-LFE device, the LiTaO3 pseudo-LFE device has much higher sensitivities to liquid electrical property changes.

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2011 Symposium on Piezoelectricity, Acoustic Waves and Device Applications (SPAWDA)

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