{"title":"黑磷场效应晶体管的p型表面电荷转移掺杂","authors":"Yuchen Du, Lingming Yang, Hong Zhou, P. Ye","doi":"10.1109/VLSI-TSA.2016.7480509","DOIUrl":null,"url":null,"abstract":"In this work, a new approach to chemically dope black phosphorus (BP) is presented which significantly enhances device performance of few-layer BP field-effect transistors (FETs). By applying 2,3,5,6-tetrafluoro-7,7,8,8-tetracyanoquinodimethane (F4-TCNQ), low on-state resistance and high field-effect mobility are achieved, where the mobility has been increased from 181.1 cm2/Vs to 228.5 cm2/Vs and the on-state resistance has been decreased from 7.4 Ω·mm down to 3.2 Ω·mm achieving a record high drain current of 531.8 mA/mm with a moderate channel length of 1.5 μm. In addition, transfer length method (TLM) structure has demonstrated a 2.9 times reduction in sheet resistance, and nearly 1.3 times decrease in contact resistance upon p-type surface charge transfer doping of BP FETs.","PeriodicalId":441941,"journal":{"name":"2016 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA)","volume":"11 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2016-04-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"P-type surface charge transfer doping of black phosphorus field-effect transistors\",\"authors\":\"Yuchen Du, Lingming Yang, Hong Zhou, P. Ye\",\"doi\":\"10.1109/VLSI-TSA.2016.7480509\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this work, a new approach to chemically dope black phosphorus (BP) is presented which significantly enhances device performance of few-layer BP field-effect transistors (FETs). By applying 2,3,5,6-tetrafluoro-7,7,8,8-tetracyanoquinodimethane (F4-TCNQ), low on-state resistance and high field-effect mobility are achieved, where the mobility has been increased from 181.1 cm2/Vs to 228.5 cm2/Vs and the on-state resistance has been decreased from 7.4 Ω·mm down to 3.2 Ω·mm achieving a record high drain current of 531.8 mA/mm with a moderate channel length of 1.5 μm. In addition, transfer length method (TLM) structure has demonstrated a 2.9 times reduction in sheet resistance, and nearly 1.3 times decrease in contact resistance upon p-type surface charge transfer doping of BP FETs.\",\"PeriodicalId\":441941,\"journal\":{\"name\":\"2016 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA)\",\"volume\":\"11 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2016-04-25\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2016 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/VLSI-TSA.2016.7480509\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2016 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/VLSI-TSA.2016.7480509","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
P-type surface charge transfer doping of black phosphorus field-effect transistors
In this work, a new approach to chemically dope black phosphorus (BP) is presented which significantly enhances device performance of few-layer BP field-effect transistors (FETs). By applying 2,3,5,6-tetrafluoro-7,7,8,8-tetracyanoquinodimethane (F4-TCNQ), low on-state resistance and high field-effect mobility are achieved, where the mobility has been increased from 181.1 cm2/Vs to 228.5 cm2/Vs and the on-state resistance has been decreased from 7.4 Ω·mm down to 3.2 Ω·mm achieving a record high drain current of 531.8 mA/mm with a moderate channel length of 1.5 μm. In addition, transfer length method (TLM) structure has demonstrated a 2.9 times reduction in sheet resistance, and nearly 1.3 times decrease in contact resistance upon p-type surface charge transfer doping of BP FETs.