微电子封装界面断裂韧性的测量

Dickson T. S. Yeung, M. Yuen, D. Lam, P. Chan
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引用次数: 10

摘要

界面粘附对塑料封装微电子(PEM)器件的可靠性起着重要的作用。当集成电路器件在装配过程中受到热负载(如焊料回流)时,渗透到PEM器件并停留在弱粘附位置的水分会蒸发。由于爆裂和开裂,导致设备故障。如果包装材料之间具有良好的粘附强度,则可以制造可靠的PEM器件。本文讨论了电子材料间界面断裂韧性的测量与测定。对市售球形顶材料与铜基体之间的界面断裂韧性进行了表征。采用四点弯曲(FPB)结构制备了具有中心预裂结构的层合试样,并进行了试验。目的是量化裂纹起裂过程中的临界断裂载荷。临界应变能释放率及其对应的模态混合率由所测临界载荷确定。以铜/球顶材料(Cu/GT)界面为例,发现加载相位角从0°(纯ⅰ型)到混合模式为40°时,其界面断裂能从4增加到18J/m2。研究结果将在本文中发表。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
MEASUREMENT OF INTERFACIAL FRACTURE TOUGHNESS FOR MICROELECTRONIC PACKAGES
Interfacial adhesion plays an important role in the reliability of plastic encapsulated microelectronic (PEM) devices. Moisture that penetrates through the PEM devices and stays in the weak adhesion location vaporizes when the IC devices are subjected to thermal loading such as solder reflow in the assembly process. Device failures result due to pop-corning and cracking. Reliable PEM devices can be manufactured if there is good adhesion strength between packaging materials. In this paper, measurement and determination of interfacial fracture toughness between electronic materials are addressed. Interfacial fracture toughness between commercially available glob-top material and copper substrate is characterized. Laminated specimens with center pre-crack configuration are prepared and tested using four-point bending (FPB) configuration. The aim is to quantify the critical fracture load during crack initiation. Critical strain energy release rate and its corresponding mode mixity are determined from the measured critical load. Copper/glob-top material (Cu/GT) interface is selected as a case study and it is found that its interfacial fracture energy increases from 4 to 18J/m2 for loading phase angle ranging from 0° (pure mode I) to a mode mixity of 40°. The results will be presented in this paper.
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