亚5nm圆柱形GAA NWMBCFET的比较与仿真研究

S. A. Kumar, J. Pravin
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引用次数: 10

摘要

本文利用TCAD (Technology Computer Aided Design)仿真工具,对用于亚5nm器件的圆柱形GAA NWFET(栅极纳米线多桥通道场效应晶体管)与圆柱形GAA nwmbcet(栅极纳米线多桥通道场效应晶体管)进行了比较。在GAA NWMBCFET中创建了四个薄通道,而不是一个垂直和水平堆叠距离相等的通道。采用耦合漂移扩散法(DD)和Shockley-Read-Hall复合法(SRH)对器件性能进行了数值评价。比较了GAA NWFET (Lg = 35nm)和GAA NWMBCFET (Lg = 5nm)、GAA NWFET (Lg = 5nm)和GAA NWMBCFET (Lg = 5nm)的转移和输出特性。由于超薄机身(UTB),器件中包含多桥通道增加了电流驱动。研究表明,GAA结构具有良好的抗短信道效应和保持静电完整性的性能。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Comparison and Simulation study of Cylindrical GAA NWMBCFET for sub 5 nm
In this paper, a cylindrical GAA NWFET (Gate All Around Nano Wire Field Effect Transistor) is compared with a cylindrical GAA NWMBCFET (Gate All Around Nano Wire Multi Bridge Channel Field Effect Transistor) for sub 5nm devices using TCAD (Technology Computer Aided Design) simulation tool. Four thin channels have been created in GAA NWMBCFET instead of one channel having equal distance between vertical and horizontal stacking. The device performance has been numerically evaluated using coupled Drift-diffusion (DD) method and Shockley-Read-Hall Recombination method (SRH). The compared transfer and output characteristics of GAA NWFET (Lg = 35nm) and GAA NWMBCFET (Lg = 5nm), GAA NWFET (Lg = 5nm) and GAA NWMBCFET (Lg = 5nm) have been reported. The inclusion of multi bridge channel in the device has increased its current drive because of the Ultra-Thin Body (UTB). It has been reported that the GAA structure has a good immunity to short channel effects and maintains the Electro Static Integrity.
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