热可调谐器件的瞬态仿真与分析

2019 International Conference on Numerical Simulation of Optoelectronic Devices (NUSOD) Pub Date : 2019-07-01 DOI:10.1109/NUSOD.2019.8807031

Fei Duan, Kai Chen, Yonglin Yu

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引用次数: 1

摘要

本文给出了悬浮波导热可调谐器件的瞬态仿真和解析公式。当金属加热器厚度从0.08 μm增加到0.16 μm，熔覆层厚度从0.4 μm增加到1.2 μm时，响应速度分别提高了10%和40%左右。此外，用氧化铝、氮化铝和氮化硅包层代替二氧化硅包层，响应速度明显提高，超过65%。

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Transient Simulations and Analyses of Thermally Tunable Devices

we present transient simulations and analytic formulas for the thermally tunable devices with suspended waveguide. The response speeds can be improved about 10% and 40%, when the thickness of metallic heater varies from 0.08 μm to 0.16 μm and the cladding thickness increases from 0.4 μm to 1.2 μm, respectively. Moreover, replacing the cladding of silica by ones of Alumina, aluminum nitride and silicon nitride, the response speed have a significant boost, more than 65%.

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2019 International Conference on Numerical Simulation of Optoelectronic Devices (NUSOD)

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