{"title":"可调谐微机械组合谐振器","authors":"M. Chatras, D. Baillargeat, P. Blondy","doi":"10.1109/ICECS.2008.4674827","DOIUrl":null,"url":null,"abstract":"In this paper, two main objectives were validated. The first one was to propose a new topology of micromachined tunable combline resonator around 30 GHz with 60% of tunable range. The second objective was to validate a technological process. This work was validated by RF measurements.","PeriodicalId":404629,"journal":{"name":"2008 15th IEEE International Conference on Electronics, Circuits and Systems","volume":"348 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2008-11-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Tunable micro-machined combline resonator\",\"authors\":\"M. Chatras, D. Baillargeat, P. Blondy\",\"doi\":\"10.1109/ICECS.2008.4674827\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this paper, two main objectives were validated. The first one was to propose a new topology of micromachined tunable combline resonator around 30 GHz with 60% of tunable range. The second objective was to validate a technological process. This work was validated by RF measurements.\",\"PeriodicalId\":404629,\"journal\":{\"name\":\"2008 15th IEEE International Conference on Electronics, Circuits and Systems\",\"volume\":\"348 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2008-11-17\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2008 15th IEEE International Conference on Electronics, Circuits and Systems\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICECS.2008.4674827\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2008 15th IEEE International Conference on Electronics, Circuits and Systems","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICECS.2008.4674827","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
In this paper, two main objectives were validated. The first one was to propose a new topology of micromachined tunable combline resonator around 30 GHz with 60% of tunable range. The second objective was to validate a technological process. This work was validated by RF measurements.