L. Grenouillet, Q. Liu, R. Wacquez, P. Morin, N. Loubet, D. Cooper, A. Pofelski, W. Weng, F. Bauman, M. Gribelyuk, Y. Wang, B. De Salvo, J. Gimbert, K. Cheng, Y. Le Tiec, D. Chanemougame, E. Augendre, S. Maitrejean, A. Khakifirooz, J. Kuss, R. Schulz, C. Janicki, B. Lherron, S. Guillaumet, O. Rozeau, F. Chafik, J. Bataillon, T. Wu, W. Kleemeier, M. Celik, O. Faynot, R. Sampson, B. Doris, M. Vinet
{"title":"用于10nm节点的UTBB FDSOI缩放使能器","authors":"L. Grenouillet, Q. Liu, R. Wacquez, P. Morin, N. Loubet, D. Cooper, A. Pofelski, W. Weng, F. Bauman, M. Gribelyuk, Y. Wang, B. De Salvo, J. Gimbert, K. Cheng, Y. Le Tiec, D. Chanemougame, E. Augendre, S. Maitrejean, A. Khakifirooz, J. Kuss, R. Schulz, C. Janicki, B. Lherron, S. Guillaumet, O. Rozeau, F. Chafik, J. Bataillon, T. Wu, W. Kleemeier, M. Celik, O. Faynot, R. Sampson, B. Doris, M. Vinet","doi":"10.1109/S3S.2013.6716546","DOIUrl":null,"url":null,"abstract":"UTBB FDSOI technology is a faster, cooler and simpler technology addressing the performance/energy consumption trade-off. In this paper we present the main front-end-of-the-line knobs to scale down this promising technology to the 10nm node.","PeriodicalId":219932,"journal":{"name":"2013 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S)","volume":"95 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2013-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"31","resultStr":"{\"title\":\"UTBB FDSOI scaling enablers for the 10nm node\",\"authors\":\"L. Grenouillet, Q. Liu, R. Wacquez, P. Morin, N. Loubet, D. Cooper, A. Pofelski, W. Weng, F. Bauman, M. Gribelyuk, Y. Wang, B. De Salvo, J. Gimbert, K. Cheng, Y. Le Tiec, D. Chanemougame, E. Augendre, S. Maitrejean, A. Khakifirooz, J. Kuss, R. Schulz, C. Janicki, B. Lherron, S. Guillaumet, O. Rozeau, F. Chafik, J. Bataillon, T. Wu, W. Kleemeier, M. Celik, O. Faynot, R. Sampson, B. Doris, M. Vinet\",\"doi\":\"10.1109/S3S.2013.6716546\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"UTBB FDSOI technology is a faster, cooler and simpler technology addressing the performance/energy consumption trade-off. In this paper we present the main front-end-of-the-line knobs to scale down this promising technology to the 10nm node.\",\"PeriodicalId\":219932,\"journal\":{\"name\":\"2013 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S)\",\"volume\":\"95 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2013-10-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"31\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2013 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/S3S.2013.6716546\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2013 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/S3S.2013.6716546","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
UTBB FDSOI technology is a faster, cooler and simpler technology addressing the performance/energy consumption trade-off. In this paper we present the main front-end-of-the-line knobs to scale down this promising technology to the 10nm node.