集成光栅读出的谐振悬臂式生物传感器

2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics Pub Date : 2008-08-26 DOI:10.1109/OMEMS.2008.4607821

H.I. Ocakli, A. Ozturk, N. Ozber, H. Kavakli, E. Alaca, H. Urey

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引用次数: 5

摘要

制作并测试了微悬臂梁生物传感器。其主要特点是简单的单掩模制作、基于光栅的灵敏光学读出、磁性薄膜驱动以及适合并行阵列操作。亚皮图质量检测灵敏度证明。

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Resonant cantilever bio sensor with integrated grating readout

Microcantilever based biosensor is fabricated and tested. The main features are the simple single mask fabrication, grating based sensitive optical readout, magnetic thin-film actuation, and suitability for parallel array operation. Sub-picogram mass detection sensitivity demonstrated.

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来源期刊

2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics

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