{"title":"双FAB制造效率AMHS","authors":"A. Liu, Chia-Cheng Kuo, Chien‐Chih Chiu","doi":"10.1109/ISSM.2007.4446803","DOIUrl":null,"url":null,"abstract":"This paper addresses the challenges facing PSC in the automation transport of twin FAB (FAB12AB). According to FAB output strategy, we have to consider the bottleneck of transportation and equipments/AMHS layout constraints. Further improved the INTER-FAB transportation capability. In our original INTER-FAB design capacity is 4400 move/day. After improved, we gained the extra 4600 move/day. It means we have improved the INTER-FAB transportation capability by 105%. In addition, the INTER-FAB transport time decreases from 18 min/move to 13 min/move.","PeriodicalId":325607,"journal":{"name":"2007 International Symposium on Semiconductor Manufacturing","volume":"41 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2007-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Efficiency AMHS for twin FAB manufacture\",\"authors\":\"A. Liu, Chia-Cheng Kuo, Chien‐Chih Chiu\",\"doi\":\"10.1109/ISSM.2007.4446803\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper addresses the challenges facing PSC in the automation transport of twin FAB (FAB12AB). According to FAB output strategy, we have to consider the bottleneck of transportation and equipments/AMHS layout constraints. Further improved the INTER-FAB transportation capability. In our original INTER-FAB design capacity is 4400 move/day. After improved, we gained the extra 4600 move/day. It means we have improved the INTER-FAB transportation capability by 105%. In addition, the INTER-FAB transport time decreases from 18 min/move to 13 min/move.\",\"PeriodicalId\":325607,\"journal\":{\"name\":\"2007 International Symposium on Semiconductor Manufacturing\",\"volume\":\"41 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2007-10-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2007 International Symposium on Semiconductor Manufacturing\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ISSM.2007.4446803\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2007 International Symposium on Semiconductor Manufacturing","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISSM.2007.4446803","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
This paper addresses the challenges facing PSC in the automation transport of twin FAB (FAB12AB). According to FAB output strategy, we have to consider the bottleneck of transportation and equipments/AMHS layout constraints. Further improved the INTER-FAB transportation capability. In our original INTER-FAB design capacity is 4400 move/day. After improved, we gained the extra 4600 move/day. It means we have improved the INTER-FAB transportation capability by 105%. In addition, the INTER-FAB transport time decreases from 18 min/move to 13 min/move.
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