半导体制造系统的统计分析与设计

Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130) Pub Date : 2000-09-26 DOI:10.1109/ISSM.2000.993681

A. Chen, P.-S. Guo, P. Lin

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引用次数: 3

摘要

半导体制造系统的巨大复杂性是制造质量控制决策的主要障碍。传统的方法，如排队网络和仿真分析，往往过于复杂，无法有效使用。在本文中，我们将展示一种方法来建立简单的统计模型，忠实地表征制造系统。然后，我们展示了这些模型如何帮助提高制造控制决策的质量。

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Statistical analysis and design of semiconductor manufacturing systems

The enormous complexity of a semiconductor manufacturing system is the main obstacle for making quality manufacturing control decisions. Conventional methodologies, such as queueing network and simulation analysis, are often too complex to be used effectively. In this paper, we will demonstrate a methodology to build simple statistical models that faithfully characterize the manufacturing system. We then show how these models can help improve the quality of manufacturing control decisions.

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Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130)

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