Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130)

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Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130) - 最新文献

Process module control for low-/spl kappa/ dielectrics [CVD]

Pub Date : 2000-12-01 DOI: 10.1109/ISSM.2000.993630 C. Hayzelden, C. Ygartua, T. Casavant, M. Slessor, A. Srivatsa, M. Guévremont, P. Stevens, M. Young, T. Lu, R. Zhang, C. Treadwell, D. Soltz, J. Lauber, M. Krumbuegel, R. Fiordalice, S. Lange, R. Marella, S. Ashkenaz, K. Monahan, T. K. Tran, J. Leu

Damage-free contact etching using balanced electron drift magnetron etcher

Pub Date : 2000-09-26 DOI: 10.1109/ISSM.2000.993626 R. Kaihara, M. Hirayama, S. Sugawa, T. Ohmil

Offline analysis techniques for the improvement of defect inspection recipes

Pub Date : 2000-09-26 DOI: 10.1109/ISSM.2000.993667 S. P. Papa Rao, R. Guldi, J. Garvin, S. Lavangkul, D. Curran, R. Worley, J. Hightower

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